Embedded component and methods of making the same

ABSTRACT

Various embodiments disclosed relate to a substrate for a semiconductor device. The substrate includes a first major surface and a second major surface opposite the first major surface. The substrate further includes a cavity defined by a portion of the first major surface. The cavity includes a bottom dielectric surface and a plurality of sidewalls extending from the bottom surface to the first major surface. A first portion of a first sidewall includes a conductive material.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a divisional of U.S. patent application Ser. No.16/472,837, filed on Jun. 21, 2019, which is a U.S. National StageFiling under 35 U.S.C. 371 from International Application No.PCT/US2016/068970, filed on Dec. 28, 2016, each of which application isincorporated herein by reference in its entirety.

BACKGROUND

Semiconductor packages include a number of electrical components thatare responsible for carrying out various functions. These components,however, can make semiconductor packages too large to fit into certaindevices. It is therefore desirable to minimize the size of semiconductorpackages.

BRIEF DESCRIPTION OF THE FIGURES

The drawings illustrate generally, by way of example, but not by way oflimitation, various embodiments discussed in the present document.

FIG. 1 is a sectional view of a semiconductor package, in accordancewith various embodiments.

FIG. 2 is a flow diagram generally illustrating a method of forming thesemiconductor package, in accordance with various embodiments.

FIGS. 3A-3C are schematic diagrams showing various stages of forming thesemiconductor package, in accordance with various embodiments.

FIG. 4 is block diagram of an electronic system, in accordance withvarious embodiments.

DETAILED DESCRIPTION

Reference will now be made in detail to certain embodiments of thedisclosed subject matter, examples of which are illustrated in part inthe accompanying drawings. While the disclosed subject matter will bedescribed in conjunction with the enumerated claims, it will beunderstood that the exemplified subject matter is not intended to limitthe claims to the disclosed subject matter.

Throughout this document, values expressed in a range format should beinterpreted in a flexible manner to include not only the numericalvalues explicitly recited as the limits of the range, but also toinclude all the individual numerical values or sub-ranges encompassedwithin that range as if each numerical value and sub-range is explicitlyrecited. For example, a range of “about 0.1% to about 5%” or “about 0.1%to 5%” should be interpreted to include not just about 0.1% to about 5%,but also the individual values (e.g., 1%, 2%, 3%, and 4%) and thesub-ranges (e.g., 0.1% to 0.5%, 1.1% to 2.2%, 3.3% to 4.4%) within theindicated range. The statement “about X to Y” has the same meaning as“about X to about Y,” unless indicated otherwise. Likewise, thestatement “about X, Y, or about Z” has the same meaning as “about X,about Y, or about Z,” unless indicated otherwise.

In this document, the terms “a,” “an,” or “the” are used to include oneor more than one unless the context clearly dictates otherwise. The term“or” is used to refer to a nonexclusive “or” unless otherwise indicated.The statement “at least one of A and B” has the same meaning as “A, B,or A and B.” In addition, it is to be understood that the phraseology orterminology employed herein, and not otherwise defined, is for thepurpose of description only and not of limitation. Any use of sectionheadings is intended to aid reading of the document and is not to beinterpreted as limiting; information that is relevant to a sectionheading may occur within or outside of that particular section.

In the methods described herein, the acts can be carried out in anyorder without departing from the principles of the inventive subjectmatter, except when a temporal or operational sequence is explicitlyrecited. Furthermore, specified acts can be carried out concurrentlyunless explicit claim language recites that they be carried outseparately. For example, a claimed act of doing X and a claimed act ofdoing Y can be conducted simultaneously within a single operation, andthe resulting process will fall within the literal scope of the claimedprocess.

The term “about” as used herein can allow for a degree of variability ina value or range, for example, within 10%, within 5%, or within 1% of astated value or of a stated limit of a range, and includes the exactstated value or range.

The term “substantially” as used herein refers to a majority of, ormostly, as in at least about 50%, 60%, 70%, 80%, 90%, 95%, 96%, 97%,98%, 99%, 99.5%, 99.9%, 99.99%, or at least about 99.999% or more, or100%.

FIG. 1 is a sectional view of semiconductor package 10. As illustrated,semiconductor package 10 includes substrate 12, cavity 14, firstelectrical component 16, and second electrical component 18. Substrate12 has a z-directional height or thickness defined between a first majorsurface 20 and second major surface 22. Substrate 12 is formed from aplurality of electronically conducting vias 30 that are embedded withindielectric material 26. Conducting vias 30 are made from anelectronically conducting material such as copper. The dielectricmaterial 26 may be selected from an organic-based build-up film, aglass-reinforced epoxy, such as FR-4, polytetrafluorethylene (Teflon), acotton-paper reinforced epoxy (CEM-3), a phenolic-glass (G3), apaper-phenolic (FR-1 or FR-2), and polyester-glass (CEM-5).

Cavity 14 is formed in substrate 12. Cavity 14 is defined by a portionof first major surface 20. Cavity 14 extends downward in a z-directionfrom first major surface 20 to bottom surface 28. Sidewalls 24 extendfrom bottom surface 28 to first major surface 20, and an x-y directionplane is defined between sidewalls 24. Sidewalls 24 may be formed fromthe dielectric material 26 but a portion of at least one of sidewalls 24is formed from an electrically conductive material. As illustrated inFIG. 1, vias 30 define a portion of sidewalls 24.

The portion of first major surface 20 defining cavity 14 may vary. Forexample, the first portion of first major surface 20 may range fromabout 10% to about 50% of the surface area of first major surface 20, orfrom about 15% to about 25% of the surface area of the first majorsurface 20, or less than, equal to, or greater than 10%, 15, 20, 25, 30,35, 40, 45, or 50% of the surface area of first major surface 20. Cavity14 extends into substrate 12 to about 15 height % to about 80 height %of substrate 12, or to about 40 height % to about 60 height % ofsubstrate 12, or less than, equal to, or greater than 15 height %, 20,25, 30, 35, 40, 45, 50, 55, 60, 65, 70, 75, or 80 height % of substrate12.

The amount that cavity 14 extends into substrate 12 may be a function ofmany different factors. For example, the extent to which cavity 14extends into substrate 12 may be driven by the height of electricalcomponent 16 disposed therein. Additionally, cavity 14 may be designedto not extend too far into substrate 12 so as not to affect thestructural integrity of substrate 12.

Cavity 14 may have a substantially circular profile or a substantiallypolygonal profile. Examples of suitable polygonal profiles include asubstantially triangular shaped profile, a substantially square shapedprofile, or a substantially rectangular shaped profile. The shape of theprofile may depend on the shape of electrical component 16 disposedtherein. For example, the shape of the profile may be designed tosubstantially match the profile of electrical component 16 to provide abetter fit and better secure the component within cavity 14.

As shown in FIG. 1, sidewalls 24 extend in a substantially perpendiculardirection from bottom surface 28 of cavity 14. The angle betweensidewalls 24 and bottom surface 28 is substantially 90 degrees. Eachsidewall 24 extends in a substantially parallel direction with respectto each other.

The number of sidewalls 24 defining cavity 14 may vary. If, for example,cavity 14 has a substantially square or rectangular profile, cavity 14will have four sidewalls 24. At least one of the four sidewalls 24 willhave a portion that is defined by a conductive material. In somecircumstances, the conductive material is the copper from via 30. Theportion of such a sidewall 24 may range from about 25% to about 100% ofthe surface area of the first sidewall 24, or about 80% to about 100% ofthe surface area of the first sidewall 24, or less than about, equal to,or greater than about 25%, 30, 35, 40, 45, 50, 55, 60, 65, 70, 75, 80,85, 90, 95, or 100% of the surface area of the first sidewall 24. Othersidewalls 24 may be substantially free of any conductive material.

As shown in FIG. 1, more than one via 30 may be present in cavity 14.For example cavity 14 may include a second via 30 which defines a secondportion of sidewalls 24. The second portion of sidewalls 24 may rangefrom about 25% to about 100% of the surface area of the first sidewall24 or a second sidewall 24, or about 80% to about 100% of the surfacearea of the first sidewall 24 or a second sidewall 24, or less thanabout, equal to, or greater than about 25%, 30, 35, 40, 45, 50, 55, 60,65, 70, 75, 80, 85, 90, 95, or 100% of the surface area of the firstsidewall 24 or the second sidewall 24. The second via 30 may be adjacentto the first via on the same sidewall 24. That is, the first and secondvias 30 may be in contact with each other or near each other.Additionally, the first and second vias 30 may be located on differentsidewalls 24.

In examples where via 30 defines a portion of sidewall 24, via 30 may beformed to have a semicircular profile. More specifically, a firstportion of via 30 may be substantially non-circular. Designing the firstportion this way may allow the first portion of via 30 to be flush withsidewall 24. This may make it easier to insert electrical component 16in cavity 14.

Additional vias 30 may define other portions of sidewalls 24. Forexample, three vias 30 may be disposed along a first sidewall 24 in arow and three vias 30 may be disposed in a row along an opposed secondsidewall 24. The amount of vias 30 in cavity 14, as well as theirlocation therein, may be driven by the location of connections inelectrical component 16 disposed in cavity 14. That is, vias 30 may bearranged in cavity 14 to form a connection with electrical component 16.

Although sidewalls 24 include a conductive material, bottom surface 28is substantially free of any conductive material. As described furtherherein, this may provide certain benefits to the semiconductor package.In some examples, bottom surface 28 is substantially planar. Bottomsurface 28 may include an adhesive material, in some examples, to helpsecure the electrical component 16 within cavity 14. Although only onecavity 14 is shown in FIG. 1, it is within the scope of this disclosureto include additional cavities.

As shown in FIG. 1, first electrical component 16 is disposed at leastpartially within cavity 14. First electrical component 16 may be one ofmany suitable electrical components such as a capacitor, a resistor, oran inductor. Electrical contacts of first electrical component 16 arejoined to vias 30. Vias 30 transmit an electrical signal to firstelectrical component 16 or receive an electrical signal from firstelectrical component 16. First electrical component 16 is held in cavity14 by solder 32.

As shown in FIG. 1, first electrical component 16 is partially embeddedin cavity 14. That is, a portion of first electrical component 16projects from cavity 14 beyond first major surface 20. Alternatively,first electrical component 16 may be configured to be completelyembedded within cavity 14, (e.g., it does not extend beyond first majorsurface 20). In some examples, the extent to which first electricalcomponent 16 projects from cavity 14 depends on the z-directional heightof second electrical component 18.

Second electrical component 18 is attached to first major surface 20 ofsubstrate 12. As shown, second electrical component 18 is not located incavity 14. Second electrical component 18 may be any suitable component.For example, second electrical component 18 may be a silicon diecomponent. Examples of suitable silicon die components include a centralprocessing unit, a flash memory, a wireless charger, a power managementintegrated circuit (PMIC), a Wi-Fi transmitter, a global positioningsystem, and a NAND flash memory stack. As shown in FIG. 1, secondelectrical component 18 is a NAND memory stack. Tre types of componentsin a stack such as second electrical component 18 can vary. For example,some stacks can include a controller, a DRAM, and a NAND stackedtogether. Second electrical component 18 may include a number ofinterconnects between it and first major surface 20 to transmit and/orreceive an electrical signal therebetween. Although only two electricalcomponents 16, 18 are shown in FIG. 1, it is within the scope of thisdisclosure to include additional electrical components.

As shown in FIG. 1, the top of second electrical component 18 is higherthan the top of first electrical component 16. In other examples, thetops of second electrical component 18 and first electrical component 16may be substantially even. In many examples, the top of first electricalcomponent 16 will not be higher than the top of second electricalcomponent 18.

Mold 34 at least partially covers first major surface 20, firstelectrical component 16, and second electrical component 18. Mold 34defines the overall z-directional height of package 10. The clearancebetween the top of mold 34 and the higher of first electrical component16 and second electrical component 18 is minimal. Therefore the overallz-directional height of package 10 is defined by the height of firstelectrical component 16 and second electrical component 18.

FIG. 2 is a flow diagram generally illustrating method 40 of formingsemiconductor package 10. As shown in FIG. 2, method 40 includes formingstep 42. In forming step 42, cavity 14 is formed in substrate 12. Method40 further includes positioning step 44. In positioning step 44, firstelectrical component 16 is placed in cavity 14.

FIGS. 3A-3C are schematic diagrams showing various stages of formingpackage 10 according to method 40. FIGS. 3A and 3B generally depictforming step 42. FIG. 3A is a top view of substrate 12. As shown, tworows of vias 30 are arranged within substrate 12. In FIG. 3B, cavity 14is formed by cutting through a portion of substrate 12 and vias 30.Cutting may be accomplished with a drill, laser, or any other suitabledevice. As shown in FIG. 3B, each via 30 is cut approximately in half inthe z-direction. This provides a flat surface to serve as a connectionto first electrical component 16. Alternatively cavity, 14 can be formedby building substrate 12 through a series of layers that each include acutout and then laminate those layers together with layers that do notinclude a cutout such that cavity 14 is formed.

FIG. 3C shows first electrical component 16 placed in cavity 14. Asshown, first electrical component 16 is in contact with vias 30. As alsoshown, there is a tight tolerance in the x-y direction between firstelectrical component 16 and sidewalls 24, with minimal gapstherebetween. First electrical component 16 may be further attached tosubstrate 12 by soldering it to substrate 12.

Second electrical component 18 may be attached to first major surface20. Second electrical component 18 may be electrically coupled tosubstrate 12 through interconnects such as solder balls or wireconnections.

There are many reasons to use package 10, including the followingnon-limiting reasons. For example, in some embodiments, cavity 14 mayallow package 10 to have an overall smaller z-directional height than acorresponding package that does not include cavity 14. In many cases itmay be desirable to reduce the z-directional height of the package 10 toa minimum. That is, a smaller z-directional height in package 10 mayhelp to reduce the overall z-directional height of a deviceincorporating package 10. The overall z-directional height reduction inpackage 10 is made possible, in part, by partially embedding firstelectrical component 16 in cavity 14. In some cases, such as when firstelectrical component 16 is a capacitor, resistor, or inductor, firstelectrical component 16 will have a larger z-directional height thansecond electrical component 18. If both components were placed on firstmajor surface 20, then first electrical component 16 would,unnecessarily, increase the overall z-directional height of package 10.By placing first electrical component 16 in cavity 14, however, theoverall z-directional height of first electronic component 16 may beless than or equal to that of second electrical component 18. Thus, theoverall z-directional height of package 10 may be minimized.

According to some embodiments, placing first electrical component 16 incavity 14 may also improve the electrical properties of package 10. Forexample, larger capacitors that had previously prohibitive z-directionalheights may now be incorporated into package 10. That is, cavity 14allows the z-directional height of a larger component to be accommodatedby designing cavity 14 to extend to a certain depth to minimize theimpact of a component's z-directional height. The ability to incorporatelarger components into package 10 may lead to increased performance inpackage 10.

According to some examples, using vias 30 as connectors to firstelectronic component 16 may reduce the overall x-y directional size ofcavity 14 compared to a corresponding package with connection points ona bottom surface of a cavity. If the connection points were on bottomsurface 28 as opposed to sidewalls 24, then sidewalls 24 would have tobe sloped. That is, sidewalls 24 would no longer be parallel to eachother. This would be necessary to make it possible for a machine toplate a bottom surface of a cavity with a conductive material. Slopingthe sidewalls 24 would increase the x-y directional size of the cavity14. However, because the conductive material in package 10 is onsidewalls 24, there is no need to slope sidewalls 24 in order to platebottom surface 28. With the decreased x-y directional size of cavity 14,more space is available on package 10 to attach additional components orform another cavity.

In some embodiments, an additional benefit to having the conductivematerial on sidewalls 24 is that it is easier to detect and repairconnection defects in package 10 than a corresponding package with theconductive material on the bottom of the cavity 14. That is, theconnection between vias 30 and first electrical component 16 arevisible. In contrast, if the connections were on bottom surface 28, thendetection and repair of a connection problem would require the completeremoval of first electrical component 16 in order to access and repairthe connections.

In some embodiments, method 40 provides a more cost effectivemanufacturing process for assembling package 10. This is because, insome examples, method 40 does not include plating a conductive materialin cavity 14. Vias 30 are already dispersed in substrate 12. Thus,forming the conductive surface in cavity 14 merely includes cuttingsubstrate 12 to expose a portion of vias 30. Therefore, there is noadditional cost or time in method 40 associates with plating aconductive material within cavity 14.

FIG. 4 illustrates a system level diagram, according to an embodiment ofthe invention. For instance, FIG. 4 depicts an example of an electronicdevice (e.g., system) including package 10, which includes firstelectronic component 16 and second electronic component 18. FIG. 4 isincluded to show an example of a higher-level device application for thepresent inventive subject matter. In an embodiment, system 100 includes,but is not limited to, a desktop computer, a laptop computer, a netbook,a tablet, a notebook computer, a personal digital assistant (PDA), aserver, a workstation, a cellular telephone, a mobile computing device,a smart phone, an Internet appliance or any other type of computingdevice. In some embodiments, system 100 is a system on a chip (SOC)system.

In an embodiment, processor 110 has one or more processing cores 112 and112N, where 112N represents the Nth processor core inside processor 110,and where N is a positive integer. In an embodiment, system 100 includesmultiple processors including 110 and 105, where processor 105 has logicsimilar or identical to the logic of processor 110. In some embodiments,processing core 112 includes, but is not limited to, pre-fetch logic tofetch instructions, decode logic to decode the instructions, executionlogic to execute instructions, and the like. In some embodiments,processor 110 has a cache memory 116 to cache instructions and/or datafor system 100. Cache memory 116 may be organized into a hierarchalstructure including one or more levels of cache memory.

In some embodiments, processor 110 includes a memory controller 114,which is operable to perform functions that enable the processor 110 toaccess and communicate with memory 130 that includes a volatile memory132 and/or a non-volatile memory 134. In some embodiments, processor 110is coupled with memory 130 and chipset 120. Processor 110 may also becoupled to a wireless antenna 178 to communicate with any deviceconfigured to transmit and/or receive wireless signals. In anembodiment, the wireless antenna 178 operates in accordance with, but isnot limited to, the IEEE 802.11 standard and its related family, HomePlug AV (HPAV), Ultra Wide Band (UWB), Bluetooth, WiMax, or any form ofwireless communication protocol.

In some embodiments, volatile memory 132 includes, but is not limitedto, Synchronous Dynamic Random Access Memory (SDRAM), Dynamic RandomAccess Memory (DRAM), RAMBUS Dynamic Random Access Memory (RDRAM),and/or any other type of random access memory device. Non-volatilememory 134 includes, but is not limited to, flash memory, phase changememory (PCM), read-only memory (ROM), electrically erasable programmableread-only memory (EEPROM), or any other type of non-volatile memorydevice.

Memory 130 stores information and instructions to be executed byprocessor 110. In an embodiment, memory 130 may also store temporaryvariables or other intermediate information while processor 110 isexecuting instructions. In the illustrated embodiment, chipset 120connects with processor 110 via Point-to-Point (PtP or P-P) interfaces117 and 122. Chipset 120 enables processor 110 to connect to otherelements in system 100. In some embodiments of the invention, interfaces117 and 122 operate in accordance with a PtP communication protocol suchas the Intel® QuickPath Interconnect (QPI) or the like. In otherembodiments, a different interconnect may be used.

In some embodiments, chipset 120 is operable to communicate withprocessors 110, 105N, display device 140, and other devices 172, 176,174, 160, 162, 164, 166, 177, etc. Chipset 120 may also be coupled to awireless antenna 178 to communicate with any device configured totransmit and/or receive wireless signals.

Chipset 120 connects to display device 140 via interface 126. Displaydevice 140 may be, for example, a liquid crystal display (LCD), a plasmadisplay, cathode ray tube (CRT) display, or any other form of visualdisplay device. In some embodiments of the invention, processor 110 andchipset 120 are merged into a single SOC. In addition, chipset 120connects to one or more buses 150 and 155 that interconnect variouselements 174, 160, 162, 164, and 166. Buses 150 and 155 may beinterconnected together via a bus bridge 172. In an embodiment, chipset120 couples with a non-volatile memory 160, a mass storage device(s)162, a keyboard/mouse 164, and a network interface 166 via interface124, smart TV 176, consumer electronics 177, etc.

In an embodiment, mass storage device 162 includes, but is not limitedto, a solid state drive, a hard disk drive, a universal serial bus flashmemory drive, or any other form of computer data storage medium. In anembodiment, network interface 166 is implemented by any type of wellknown network interface standard including, but not limited to, anEthernet interface, a universal serial bus (USB) interface, a PeripheralComponent Interconnect (PCI) Express interface, a wireless interfaceand/or any other suitable type of interface. In an embodiment, thewireless interface operates in accordance with, but is not limited to,the IEEE 802.11 standard and its related family, Home Plug AV (HPAV),Ultra Wide Band (UWB), Bluetooth, WiMax, or any form of wirelesscommunication protocol.

While the modules shown in FIG. 4 are depicted as separate blocks withinthe system 100, the functions performed by some of these blocks may beintegrated within a single semiconductor circuit or may be implementedusing two or more separate integrated circuits. For example, althoughcache memory 116 is depicted as a separate block within processor 110,cache memory 116 (or selected aspects of cache memory 116) may beincorporated into processor core 112.

Additional Embodiments

The following exemplary embodiments are provided, the numbering of whichis not to be construed as designating levels of importance:

Embodiment 1 provides a substrate comprising:

a first major surface;

a second major surface opposite the first major surface; and

a cavity defined by a portion of the first major surface, wherein thecavity comprises:

a bottom dielectric surface; and

a plurality of sidewalls extending from the bottom surface to the firstmajor surface, wherein a first portion of a first sidewall comprises aconductive material.

Embodiment 2 provides the substrate of any one of Embodiments 1, whereinthe substrate comprises a dielectric material.

Embodiment 3 provides the substrate of any one of Embodiments 1-2,wherein the dielectric material is at least one of organic-basedbuild-up film, glass-reinforced epoxy, cotton-paper reinforced epoxy(CEM-3), phenolic-glass (G3), paper-phenolic (FR-1 or FR-2), andpolyester-glass (CEM-5).

Embodiment 4 provides the substrate of any one of Embodiments 1-3,wherein the portion of the first major surface forming the cavity isabout 10% to about 50% of the surface area of the first major surface.

Embodiment 5 provides the substrate of any one of Embodiments 1-4,wherein the portion of the first major surface forming the cavity isabout 15% to about 25% of the surface area of the first major surface.

Embodiment 6 provides the substrate of any one of Embodiments 1-5,wherein a height of the substrate is defined between the first majorsurface and the second major surface.

Embodiment 7 provides the substrate of any one of Embodiments 1-6,wherein the cavity extends to about 15 height % to about 80 height % ofthe substrate.

Embodiment 8 provides the substrate of any one of Embodiments 1-7,wherein the cavity extends to about 40 height % to about 60 height % ofthe substrate.

Embodiment 9 provides the substrate of any one of Embodiments 1-8,wherein the cavity has a substantially polygonal profile.

Embodiment 10 provides the substrate of any one of Embodiments 1-9,wherein the polygonal profile is substantially triangular shaped,substantially square shaped, or substantially rectangular shaped.

Embodiment 11 provides the substrate of any one of Embodiments 1-10,wherein the sidewalls extend in a substantially perpendicular directionfrom the bottom surface of the cavity.

Embodiment 12 provides the substrate of any one of Embodiments 1-11,wherein the sidewalls are substantially parallel to each other.

Embodiment 13 provides the substrate of any one of Embodiments 1-12,wherein the first portion of the first sidewall is about 25% to about100% of the first sidewall.

Embodiment 14 provides the substrate of any one of Embodiments 1-13,wherein the first portion of the first sidewall is about 80% to about100% of the first sidewall.

Embodiment 15 provides the substrate of any one of Embodiments 1-14,wherein the conductive material is copper.

Embodiment 16 provides the substrate of any one of Embodiments 1-15,wherein the conductive material comprises a first via at least partiallyembedded within the substrate.

Embodiment 17 provides the substrate of any one of Embodiments 1-16,wherein the first via has a semicircular profile.

Embodiment 18 provides the substrate of any one of Embodiments 1-17,wherein a first portion of the first via is flush with the sidewalls.

Embodiment 19 provides the substrate of any one of Embodiments 1-18,wherein the conductive material further comprises a second via.

Embodiment 20 provides the substrate of any one of Embodiments 1-19,wherein the second via is adjacent to the first via on the sidewalls.

Embodiment 21 provides the substrate of any one of Embodiments 1-20,wherein the first via and the second via are in direct contact with eachother.

Embodiment 22 provides the substrate of any one of Embodiments 1-21,wherein a second portion of a second sidewall comprises a conductivematerial.

Embodiment 23 provides the substrate of any one of Embodiments 1-22,wherein the second portion of the second sidewall is about 25% to about100% of the first sidewall.

Embodiment 24 provides the substrate of any one of Embodiments 1-23,wherein the second portion of the second sidewall is about 80% to about100% of the first sidewall.

Embodiment 25 provides the substrate of any one of Embodiments 1-24,wherein the conductive material comprises a third via at least partiallyembedded within the substrate.

Embodiment 26 provides the substrate of any one of Embodiments 1-25,wherein the third via has a semicircular profile.

Embodiment 27 provides the substrate of any one of Embodiments 1-26,wherein a second portion of the third via is flush with the sidewalls.

Embodiment 28 provides the substrate of any one of Embodiments 1-27,wherein the conductive material comprises a fourth via.

Embodiment 29 provides the substrate of any one of Embodiments 1-28,wherein the fourth via is adjacent to the third via on the sidewalls.

Embodiment 30 provides the substrate of any one of Embodiments 1-29,wherein the third via and the fourth via are in direct contact with eachother.

Embodiment 31 provides the substrate of any one of Embodiments 1-30,wherein the bottom surface of the cavity is free of any conductivematerial.

Embodiment 32 provides a semiconductor package comprising:

a substrate comprising:

a first major surface; and

a cavity defined by a portion of the first major surface, wherein thecavity comprises:

-   -   a bottom dielectric surface; and    -   a plurality of sidewalls extending from the bottom surface to        the first major surface, wherein a portion of at least one of        the sidewalls comprises a conductive material; and a first        electrical component disposed at least partially within the        cavity; and

a second electrical component disposed on the first major surface of thesubstrate.

Embodiment 33 provides the semiconductor package of Embodiment 32,wherein the first electrical component is at least one of a capacitor, aresistor, and an inductor.

Embodiment 34 provides the semiconductor package of any one ofEmbodiments 32-33, wherein the second electrical component is a silicondie.

Embodiment 35 provides the semiconductor package of any one ofEmbodiments 32-34, wherein the silicon die is at least one of a centralprocessing unit, a flash memory, a wireless charger, a power managementintegrated circuit (PMIC), a Wi-Fi transmitter, a global positioningsystem, and a NAND stack.

Embodiment 36 provides the semiconductor package of any one ofEmbodiments 32-35, wherein a top surface of the first electricalcomponent is substantially even with a top surface of the secondelectrical component.

Embodiment 37 provides the semiconductor package of any one ofEmbodiments 32-36, wherein the substrate comprises a dielectricmaterial.

Embodiment 38 provides the semiconductor package of any one ofEmbodiments 32-37, wherein the dielectric material is at least one oforganic-based build-up film, glass-reinforced epoxy, cotton-paperreinforced epoxy (CEM-3), phenolic-glass (G3), paper-phenolic (FR-1 orFR-2), and polyester-glass (CEM-5).

Embodiment 39 provides the semiconductor package of any one ofEmbodiments 32-38, wherein the portion of the first major surfaceforming the cavity is about 10% to about 50% of the surface area of thefirst major surface.

Embodiment 40 provides the semiconductor package of any one ofEmbodiments 32-39, wherein the portion of the first major surfaceforming the cavity is about 15% to about 25% of the surface area of thefirst major surface.

Embodiment 41 provides the semiconductor package of any one ofEmbodiments 32-40, wherein a height of the substrate is defined betweenthe first major surface and an opposed second major surface.

Embodiment 42 provides the semiconductor package of any one ofEmbodiments 32-41, wherein the cavity extends to about 15 height % toabout 80 height % of the substrate.

Embodiment 43 provides the semiconductor package of any one ofEmbodiments 32-42, wherein the cavity extends to about 40 height % toabout 60 height % of the substrate.

Embodiment 44 provides the semiconductor package of any one ofEmbodiments 32-43, wherein the cavity has a substantially polygonalprofile.

Embodiment 45 provides the semiconductor package of any one ofEmbodiments 32-44, wherein the polygonal profile is substantiallytriangular shaped, substantially square shaped, or substantiallyrectangular shaped.

Embodiment 46 provides the semiconductor package of any one ofEmbodiments 32-45, wherein the sidewalls extend in a substantiallyperpendicular direction from the bottom surface of the cavity.

Embodiment 47 provides the semiconductor package of any one ofEmbodiments 32-46, wherein the sidewalls are substantially parallel toeach other.

Embodiment 48 provides the semiconductor package of any one ofEmbodiments 32-47, wherein the first portion of the first sidewall isabout 25% to about 100% of the first sidewall.

Embodiment 49 provides the semiconductor package of any one ofEmbodiments 32-48, wherein the first portion of the first sidewall isabout 80% to about 100% of the first sidewall.

Embodiment 50 provides the semiconductor package of any one ofEmbodiments 32-49, wherein the conductive material is copper.

Embodiment 51 provides the semiconductor package of any one ofEmbodiments 32-50, wherein the conductive material comprises a first viaat least partially embedded within the substrate.

Embodiment 52 provides the semiconductor package of any one ofEmbodiments 32-51, wherein the first via has a semicircular profile.

Embodiment 53 provides the semiconductor package of any one ofEmbodiments 32-52, wherein a first portion of the first via is flushwith the first sidewall.

Embodiment 54 provides the semiconductor package of any one ofEmbodiments 32-53, wherein the conductive material further comprises asecond via.

Embodiment 55 provides the semiconductor package of any one ofEmbodiments 32-54, wherein the second via is adjacent to the first viaon the first sidewall.

Embodiment 56 provides the semiconductor package of any one ofEmbodiments 32-55, wherein the first via and the second via are indirect contact with each other.

Embodiment 57 provides the semiconductor package of any one ofEmbodiments 32-56, wherein a second portion of a second sidewallcomprises a conductive material.

Embodiment 58 provides the semiconductor package of any one ofEmbodiments 32-57, wherein the second portion of the second sidewall isabout 25% to about 100% of the first sidewall.

Embodiment 59 provides the semiconductor package of any one ofEmbodiments 32-58, wherein the second portion of the second sidewall isabout 80% to about 100% of the first sidewall.

Embodiment 60 provides the semiconductor package of any one ofEmbodiments 32-59, wherein the conductive material comprises a third viaat least partially embedded within the substrate.

Embodiment 61 provides the semiconductor package of any one ofEmbodiments 32-60, wherein the third via has a semicircular profile.

Embodiment 62 provides the semiconductor package of any one ofEmbodiments 32-61, wherein a second portion of the third via is flushwith the first sidewall.

Embodiment 63 provides the semiconductor package of any one ofEmbodiments 32-62, wherein the conductive material comprises a fourthvia.

Embodiment 64 provides the semiconductor package of any one ofEmbodiments 32-63, wherein the fourth via is adjacent to the third viaon the first sidewall.

Embodiment 65 provides the semiconductor package of any one ofEmbodiments 32-64, wherein the third via and the fourth via are indirect contact with each other.

Embodiment 66 provides the semiconductor package of any one ofEmbodiments 32-65, wherein the bottom surface of the cavity is free ofany conductive material.

Embodiment 67 provides a method of forming a semiconductor packagecomprising:

forming a cavity in a substrate having a height defined between a firstmajor surface and an opposed second major surface to expose at least aportion of a plurality of vias extending along a sidewall of the cavity;and

positioning an electrical component in the cavity, wherein theelectrical component contacts the vias.

Embodiment 68 provides the method of Embodiment 67, wherein the cavityis formed by cutting the substrate.

Embodiment 69 provides the method of any one of Embodiments 67-68,wherein the substrate is cut with at least one of a laser and a drill.

Embodiment 70 provides the method of any one of Embodiments 67-69,wherein the substrate is cut to have a substantially polygonal profile.

Embodiment 71 provides the method of any one of Embodiments 67-70,wherein the polygonal profile is substantially triangular shaped,substantially square shaped, or substantially rectangular shaped.

Embodiment 72 provides the method of any one of Embodiments 67-71,wherein the cavity is cut to form sidewalls extending in a directionsubstantially parallel to each other.

Embodiment 73 provides the method of any one of Embodiments 67-72,wherein the cavity is cut to a depth ranging from about 10 height % toabout 90 height % of the substrate.

Embodiment 74 provides the method of any one of Embodiments 67-73,wherein the cavity is cut to a depth ranging from about 50 height % toabout 80 height % of the substrate.

Embodiment 75 provides the method of any one of Embodiments 67-74,wherein forming the cavity comprises cutting through the portion of theplurality of vias.

Embodiment 76 provides the method of any one of Embodiments 67-75,wherein the vias are cut in half in a z-direction.

Embodiment 77 provides the method of any one of Embodiments 67-76,wherein the electrical component is at least one of a capacitor, aresistor, and an inductor.

Embodiment 78 provides the method of any one of Embodiments 67-77,further comprising soldering the connection between the electricalcomponent and the exposed portion of at least one of the vias.

Embodiment 79 provides the method of any one of Embodiments 67-78,further comprising attaching a silicon die to the first major surface ofthe substrate.

Embodiment 80 provides the method of any one of Embodiments 67-79,wherein the silicon die is at least one of a central processing unit, aflash memory, a wireless charger, a power management integrated circuit(PMIC), a Wi-Fi transmitter, a global positioning system, and a NANDstack.

What is claimed is:
 1. A method of forming a semiconductor packagecomprising: forming a cavity in a substrate having a height definedbetween a first major surface and an opposed second major surface toexpose at least a portion of a plurality of vias extending along asidewall of the cavity; and positioning an electrical component in thecavity, wherein the electrical component contacts the vias.
 2. Themethod of claim 1, wherein the cavity is formed by cutting thesubstrate.
 3. The method of claim 1, further comprising soldering aconnection between the electrical component and the exposed portion ofat least one of the vias.
 4. The method of claim 1, wherein forming thecavity comprises cutting through the portion of the plurality of vias.5. The method of claim 1, wherein the electrical component comprises asilicon die.
 6. The method of claim 5, wherein the silicon die is atleast one of a central processing unit, a flash memory, a wirelesscharger, a power management integrated circuit (PMIC), a Wi-Fitransmitter, and a global positioning system, and a NAND stack.
 7. Themethod of claim 1, wherein forming the cavity comprises cutting throughthe portion of the plurality of vias.
 8. The method of claim 7, whereinthe vias are cut in half in a z-direction.
 9. The method of claim 1,wherein the electrical component is at least one of a capacitor, aresistor, and an inductor.
 10. The method of claim 1, wherein the cavityis cut to a depth ranging from about 10 height % to about 90 height % ofthe substrate.
 11. The method of claim 1, wherein the cavity comprises:an exposed bottom dielectric surface that is substantially free of anyconductive material; a plurality of sidewalls extending from the bottomsurface to the first major surface, wherein the plurality of sidewallscomprises a conductive material along an entire height of the pluralityof sidewalls.
 12. The method of claim 1, wherein the electricalcomponent is disposed in the cavity and in electrical contact with theplurality of sidewalls along the entire height of the plurality ofsidewalls.